Processing and characterization of edgeless radiation detectors for large area detection
Autor
Rok
2013
Časopis
Nuclear Instruments and Methods in Physics Research A, Volume 731, p. 205-209
Web
Obsah
The edgeless or active edge silicon pixel detectors have been gaining a lot of interest due to improved silicon processing capabilities. At VTT, we have recently triggered a multi-project wafer process of edgeless silicon detectors. Totally SO pieces of 150 mm wafers were processed to provide a given number of detector variations. Fabricated detector thicknesses were 100, 200, 300 and 500 rim. The polarities of the fabricated detectors On the given thicknesses were n-in-n, p-in-n, n-in-p and p-in-p. On the n-in-n and n-in-p wafers the pixel isolation was made either with a Common p-stop grid or with a shallow p-spray doping. The wafer materials were high resistivity Float Zone and Magnetic Czochralski silicon with crystal orientation of < 100 >. In this paper, the electric properties on various types or detectors are presented. The results from spectroscopic measurement show a good energy resolution of the edge pixels, indicating an excellent charge collection near the edge pixels of the edgeless detector.
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Příklad citace článku:
J. Kalliopuska, X. Wu, J. Jakůbek, . Eränen, T. Virolainen, "Processing and characterization of edgeless radiation detectors for large area detection", Nuclear Instruments and Methods in Physics Research A, Volume 731, p. 205-209 (2013)